Scientific journal
Scientific Review. Technical science
ISSN 2500-0799
ПИ №ФС77-57440

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A MECHANISM OF PROCESS AND TECHNOLOGY OF GAS-PHASE ALUMINUM NITRIDE SYNTHESIS

Elagin A.A. 1 Shishkin R.A. 1 Afonin Y.D. 1 Beketov A.R. 1 Baranov M.V. 1
1 «Ural Federal University named after the first President of Russia B.N.Yeltsin»
Currently the aluminum nitride has established itself as a material with a unique combination of properties. From a number of ceramic materials with similar characteristics (magnesium oxide, beryllium oxide, boron nitride), aluminum nitride differs by high thermal conductivity, high coefficient of electrical resistivity and corrosion resistance under many aggressive conditions. Also it is characterized by a moderate linear coefficient of thermal expansion and high thermal stability. The search for new technologies for the production of this material is an urgent problem in the world [7], since the quality of the aluminum nitride is largely determined by the presence of oxygen and carbon impurities and existing industrial synthesis methods cannot provide high purity of the final product. In addition, an important characteristic for the manufacture of ceramic materials is the size of the aluminum nitride powder obtained. The possibility of variation of this parameter during the synthesis allows obtaining powder with the optimum particle size distribution that does not require additional grinding, which is undesirable from the standpoint of product purity and efficiency of the process. Gas-phase synthesis is one of the most promising methods for the industrial production of high-purity aluminum nitride with a specified particle size. This paper describes the technology and examines the mechanism of the process of obtaining a powder of aluminum nitride gas-phase method.