A MECHANISM OF PROCESS AND TECHNOLOGY OF GAS-PHASE ALUMINUM NITRIDE SYNTHESIS
Elagin A.A.1,Shishkin R.A.1,Afonin Y.D.1,Beketov A.R.1,Baranov M.V.1
1«Ural Federal University named after the first President of Russia B.N.Yeltsin»
Bibliographic Reference
Elagin A.A., Shishkin R.A., Afonin Y.D., Beketov A.R., Baranov M.V. A MECHANISM OF PROCESS AND TECHNOLOGY OF GAS-PHASE ALUMINUM NITRIDE SYNTHESIS // Scientific Review. Technical science. 2014. No. 1. pp. 152-152;
URL: https://science-engineering.ru/en/article/view?id=214 (accessed: 17/10/2026).
URL: https://science-engineering.ru/en/article/view?id=214 (accessed: 17/10/2026).