Scientific journal
Scientific Review. Technical science
ISSN 2500-0799
ПИ №ФС77-57440

GAS-PHASE METHOD FOR PREPARING ALUMINIUM NITRIDE POWDER: A THERMODYNAMIC ANALYSIS

Elagin A.A. 1 Shishkin R.A. 1 Beketov A.R. 1 Baranov M.V. 1
1 «Ural Federal University named after the first President of Russia B.N.Yeltsin
Aluminum nitride powder was produced at the Institute of Physics and Technology using the unique industrial gas-phase approach through a monofluoride buildup step. However, no thermodynamic calculations of all the possible reactions between the materials in the reaction chamber and the furnace feed were performed. It is now feasible to completely understand the kinetics and mechanisms of the chemical reactions to optimize and improve both the design of the apparatus and its materials. However, the final goal is not only to produce aluminum nitride powder but also sintered bodies. Therefore, special attention should be given to the thermodynamic calculations and the choice of sintering aids added during aluminum nitride synthesis to avoid absorption of unnecessary oxygen during the sintering step. In conclusion, a sintering mixture was produced that can be used to produce an aluminum nitride-sintered body with high thermal conductivity using a minimal amount of energy during production.